Fabrication, design, and analysis of physical systems, sensors, and actuators at the nanoscale and microscale. Microfabrication/nanofabrication, fabrication process design, electrostatistic and electromagnetic interactions, signal transduction, measurements. Course work will focus on process and system design. ENGR majors only. Pre: 331 (with a minimum grade of C-), 375 (with a minimum grade of C-), or consent.